Title :
Automatic surface defects detection on silicon wafers
Author :
Miron, N. ; Sporea, Dan G.
fDate :
28 Aug-2 Sep 1994
Keywords :
Inspection; Laser beams; Laser theory; Lenses; Light scattering; Mirrors; Optical scattering; Photomultipliers; Silicon; Surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics Europe, 1994 Conference on
Print_ISBN :
0-7803-1789-0
DOI :
10.1109/CLEOE.1994.636585
