(Almost) present at the creation: 25 years of modelling and simulation in semiconductor manufacturing

Summary form only given. Over the last three decades an extensive research literature on modelling and simulation applications in the semiconductor industry has developed. Extensive relationships between academic research groups and industry have also been in evidence. This presentation will briefly review the evolution of modelling and analysis research in semiconductor manufacturing from an academic perspective, discuss its implications for academic research and industrial practice, and suggest a number of future directions for research and for more effective industry-university collaboration.