A novel inductor on slow-wave substrate: Single layer with periodic rectangular compact coil on ground plane

A new slow-wave substrate to improve planar inductor performance is investigated by rigorous simulations. The alternative structure consisting of conventional inductor on the substrate top surface, Arlon AR1000trade (epsivr = 9.6) and a two-dimensional (2-D) rectangular compact coils array etched in the ground plane. Others slow-wave structures use complex multilayer, periodic via holes through the substrate or circular periodic pattern. In this work we proposed a simple rectangular compact coil structure. It is shown the effect produced by the simple structure on the inductance -30%, Q-factor -16% and self-resonance. A comparison between the novel inductor and the inductor with uniform ground plane have also been carried out.