DocumentCode
2394946
Title
MEMS dilemma: how to move from the "technology push" to the "market pull" category?
Author
Vigna, Benedetto
fYear
2003
fDate
6-8 Oct. 2003
Firstpage
159
Lastpage
163
Abstract
In this paper, we examine the background of these problems with some practical examples and some potential solutions to help MEMS to leave the "technology push" category for the "market pull" category.
Keywords
micromechanical devices; MEMS dilemma; technology push-market pull category; Accelerometers; Manufacturing; Microelectromechanical devices; Microelectronics; Micromechanical devices; Packaging; Production; Silicon; Standardization; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, Systems, and Applications, 2003 International Symposium on
ISSN
1524-766X
Print_ISBN
0-7803-7765-6
Type
conf
DOI
10.1109/VTSA.2003.1252577
Filename
1252577
Link To Document