Title :
Analysis and Modeling of RF-MEMS Disk Resonator
Author :
Sakr, Mostafa M. ; El-Shafie, Mousa Khalid ; Ragai, Hany Fikry
Abstract :
This paper presents the analysis and modeling of MEMS disk resonator. The main parameters that describe the operation of the disk are the quality factor, natural frequency and equivalent mass. In this work the frequency relation versus Poisson´s ratio of the material and a general equation for the equivalent mass of disk resonator are obtained for different vibration modes of the disk resonator. The resulting model is formulated such that it can be coded by any suitable language such as systemC, verilog-AMS or VHDL-AMS. The model is verified by ANSYS
Keywords :
Poisson equation; Q-factor; micromechanical resonators; ANSYS; Poisson ratio; RF-MEMS disk resonator; equivalent mass; general equation; natural frequency; quality factor; vibration modes; Damping; Differential equations; Frequency; Micromechanical devices; Partial differential equations; Poisson equations; Q factor; Radiofrequency microelectromechanical systems; Terminology; Vibrations;
Conference_Titel :
MEMS, NANO and Smart Systems, The 2006 International Conference on
Conference_Location :
Cairo
Print_ISBN :
1-4244-0899-7
DOI :
10.1109/ICMENS.2006.348208
