Yield improvement of a large area magnetic field sensor array design using redundancy schemes

Author

Audet, Yves ; Chapman, Glenn H.

Author_Institution

Sch. of Eng. Sci., Simon Fraser Univ., Burnaby, BC, Canada

fYear

1995

fDate

18-20 Jan 1995

Firstpage

207

Lastpage

216

Abstract

Design of a Large Area Magnetic Field Sensor Array (LAMSA) using redundancy schemes concurrently with the laser link technology for fault repairs is presented. Experimental results obtained on a laser restructurable subarray of three magnetic field sensor cells are shown. An experimental yield measurement method to determine parameters of two yield detractors is described. These parameters obtained from regular sized VLSI chips are used to predict the yield of larger sensor array designs implemented with redundancy

Keywords

VLSI; integrated circuit design; integrated circuit yield; magnetic sensors; redundancy; VLSI chips; fault repairs; large area sensor array design; laser link technology; laser restructurable subarray; magnetic field sensor array; redundancy schemes; yield improvement; yield measurement method; Circuit faults; Integrated circuit yield; Laser theory; Magnetic field measurement; Magnetic sensors; Optical arrays; Optical design; Redundancy; Semiconductor device measurement; Sensor arrays;

fLanguage

English

Publisher

ieee

Conference_Titel

Wafer Scale Integration, 1995. Proceedings., Seventh Annual IEEE International Conference on

Conference_Location

San Francisco, CA

Print_ISBN

0-7803-2467-6

Type

conf

DOI

10.1109/ICWSI.1995.515455

Filename

515455