Title :
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.91CH3042-9)
Abstract :
The following topics are dealt with: raw materials issues; process control and improvement methodologies; and manufacturing technology transfer/maintenance and reliability of equipment and facilities
Keywords :
integrated circuit manufacture; maintenance engineering; process control; reliability; semiconductor device manufacture; advanced semiconductor manufacturing; maintenance; manufacturing technology transfer; process control; raw materials; reliability;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1991. ASMC 91 Proceedings. IEEE/SEMI 1991
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-0152-8
DOI :
10.1109/ASMC.1991.167367
