World class manufacturing CIM or sink

Author

Miller, David J. ; Anastasio, Frank J.

Author_Institution

IBM, Essex Junction, VT, USA

fYear

1991

fDate

21-23 Oct 1991

Firstpage

32

Lastpage

38

Abstract

The authors consider the computer integrated manufacturing (CIM) system developed and implemented in IBM´s semiconductor manufacturing line in its Essex Junction, Vermont, facility. The CIM system architecture and the features designed into the system to support the 16-Mb DRAM technology program are described. Major hardware, software, architecture, and integration components are discussed, including equipment control, automation, automatic processing, logistics management, supervision and control capabilities, database integration, networks, and interfaces

Keywords

CAD/CAM; DRAM chips; integrated circuit manufacture; manufacturing computer control; manufacturing data processing; CIM; DRAM technology; IBM; automatic processing; automation; computer integrated manufacturing; database integration; equipment control; integration components; logistics management; semiconductor manufacturing line; supervision; system architecture; Automatic control; Computer aided manufacturing; Computer architecture; Computer integrated manufacturing; Hardware; Logistics; Manufacturing automation; Process control; Random access memory; Semiconductor device manufacture;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1991. ASMC 91 Proceedings. IEEE/SEMI 1991

Conference_Location

Boston, MA

Print_ISBN

0-7803-0152-8

Type

conf

DOI

10.1109/ASMC.1991.167378

Filename

167378