Title :
First principle calculation of ZnSe epitaxy on Si and GaAs substrates
Author :
Chen, Liangyan ; Fang, Chao
Author_Institution :
Sch. of Electr. & Electron. Eng., Wuhan Polytech. Univ., Wuhan, China
Abstract :
With first principle calculations, theoretical studies of ZnSe epitaxy growth both on GaA (001) and Si(001) surfaces were performed, the bonding energy of absorbing monolayer atoms, charge and binding properties of the interface atoms were thoroughly investigated to account for the growth of ZnSe films on different GaAs and Si substrates. And it´s concluded that As-terminated stable AsGa(001) substrate placed in Zn atmosphere, with absorption of Zn atoms on AsGa(001) substrate, which can be a counterweight to form a neutral GaAs/ZnSe interface, may be helpful in reducing the defects of the ZnSe epitaxy growth on GaAs(001) substrate. It´s not the lattice mismatch between substrates and epitaxy layers but the non-polar ionic bond and polar covalent bond variety which played a vital role in ZnSe epitaxy growth on Si (001) and GaAs(001) layers.
Keywords :
II-VI semiconductors; III-V semiconductors; ab initio calculations; binding energy; defect states; gallium arsenide; interface states; monolayers; semiconductor epitaxial layers; semiconductor growth; vapour phase epitaxial growth; wide band gap semiconductors; zinc compounds; AsGa(001) substrate; CVD; GaAs; GaAs-ZnSe; Si; absorbing monolayer atoms; binding properties; bonding energy; charge properties; epitaxy layers; first principle calculation; gallium aresenide-zinc selenide interface; gallium arsenide substrates; interface atoms; lattice mismatch; nonpolar ionic bond; polar covalent bond; silicon substrates; zinc selenide defect states; zinc selenide epitaxial growth; zinc selenide films; Atomic layer deposition; Epitaxial growth; Gallium arsenide; Lattices; Silicon; Substrates; Zinc; First principle calculation lattice match; Non-polar covalent bond; Polar ionic bond; counterweight;
Conference_Titel :
Systems and Informatics (ICSAI), 2012 International Conference on
Conference_Location :
Yantai
Print_ISBN :
978-1-4673-0198-5
DOI :
10.1109/ICSAI.2012.6223590