DocumentCode
2398472
Title
Using transformations to analyze defect structure SPC charts: a case study
Author
Mojzak, Gregory
Author_Institution
Digital Equipment Corp., Hudson, MA, USA
fYear
1991
fDate
21-23 Oct 1991
Firstpage
149
Lastpage
152
Abstract
A method of applying SPC (statistical process control) to binomial data is discussed. A normalizing transformation is applied to the raw data, which then enables the use of standard SPC tools. A case study drawn from semiconductor defect structure analysis is presented, although this technique is applicable to binomial data in general
Keywords
integrated circuit manufacture; statistical process control; binomial data; case study; defect structure SPC charts; normalizing transformation; semiconductor defect structure analysis; standard SPC tools; statistical process control; Application software; Capacitors; Computer aided software engineering; Conductors; Electronic switching systems; Fabrication; Monitoring; Silicon; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1991. ASMC 91 Proceedings. IEEE/SEMI 1991
Conference_Location
Boston, MA
Print_ISBN
0-7803-0152-8
Type
conf
DOI
10.1109/ASMC.1991.167401
Filename
167401
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