• DocumentCode
    2398810
  • Title

    Femtosecond laser-assisted microstructuring of silicon for novel detector, sensing and display technologies

  • Author

    Carey, James E. ; Mazur, Eric

  • Author_Institution
    Dept. of Eng. & Appl. Phys., Harvard Univ., Cambridge, MA, USA
  • Volume
    2
  • fYear
    2003
  • fDate
    27-28 Oct. 2003
  • Firstpage
    481
  • Abstract
    In this talk we present the unique optical and electronic properties of microstructured silicon photodiode, discuss the formation process of conical microstructures, and review the chemical and structural make-up of the surface that are responsible for the novel optoelectronic microstructures. We also discuss future directions for this technique including structuring of new materials, incorporation of new ambient gases, and better control over the position and density of the microstructures themselves.
  • Keywords
    elemental semiconductors; high-speed optical techniques; laser materials processing; optoelectronic devices; photodiodes; silicon; Si; conical microstructures; display technology; electronic property; femtosecond laser-assisted microstructuring; microstructured silicon photodiode; optical property; optoelectronic microstructures; sensing technology; Chemical lasers; Chemical processes; Chemical technology; Displays; Microstructure; Optical sensors; Photodiodes; Silicon; Ultrafast electronics; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
  • ISSN
    1092-8081
  • Print_ISBN
    0-7803-7888-1
  • Type

    conf

  • DOI
    10.1109/LEOS.2003.1252883
  • Filename
    1252883