DocumentCode
2398810
Title
Femtosecond laser-assisted microstructuring of silicon for novel detector, sensing and display technologies
Author
Carey, James E. ; Mazur, Eric
Author_Institution
Dept. of Eng. & Appl. Phys., Harvard Univ., Cambridge, MA, USA
Volume
2
fYear
2003
fDate
27-28 Oct. 2003
Firstpage
481
Abstract
In this talk we present the unique optical and electronic properties of microstructured silicon photodiode, discuss the formation process of conical microstructures, and review the chemical and structural make-up of the surface that are responsible for the novel optoelectronic microstructures. We also discuss future directions for this technique including structuring of new materials, incorporation of new ambient gases, and better control over the position and density of the microstructures themselves.
Keywords
elemental semiconductors; high-speed optical techniques; laser materials processing; optoelectronic devices; photodiodes; silicon; Si; conical microstructures; display technology; electronic property; femtosecond laser-assisted microstructuring; microstructured silicon photodiode; optical property; optoelectronic microstructures; sensing technology; Chemical lasers; Chemical processes; Chemical technology; Displays; Microstructure; Optical sensors; Photodiodes; Silicon; Ultrafast electronics; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
ISSN
1092-8081
Print_ISBN
0-7803-7888-1
Type
conf
DOI
10.1109/LEOS.2003.1252883
Filename
1252883
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