DocumentCode
2399324
Title
Future challenges in IC testing and fault isolation
Author
Vallett, David P.
Author_Institution
IBM Microelectron. Div., USA
Volume
2
fYear
2003
fDate
27-28 Oct. 2003
Firstpage
539
Abstract
Integrated circuit (IC) production is critically dependent on characterization and failure analysis (FA) (Ref. 1). Experiment evaluation, technology qualification, yield and reliability learning, and time-to-market are driven by rapid and accurate FA. Testing and fault isolation are essential in identifying electrical faults and in localizing them to regions small enough to be examined by high-resolution electron and scanning-probe microscopes. This presentation introduces IC characterization and failure analysis, discusses their roles in manufacturing, and examines limitations imposed by shrinking features, lower supply voltages, and smaller design margins. R&D needs are also projected based on the CMOS IC technology roadmap (Ref. 1).
Keywords
electron microscopes; failure analysis; fault location; integrated circuit reliability; integrated circuit testing; integrated circuit yield; scanning probe microscopy; IC testing; electrical faults; electron microscope; failure analysis; fault isolation; integrated circuit production; reliability learning; scanning-probe microscopes; technology qualification; CMOS technology; Circuit faults; Circuit testing; Failure analysis; Integrated circuit technology; Integrated circuit testing; Integrated circuit yield; Isolation technology; Production; Qualifications;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
ISSN
1092-8081
Print_ISBN
0-7803-7888-1
Type
conf
DOI
10.1109/LEOS.2003.1252912
Filename
1252912
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