• DocumentCode
    2399324
  • Title

    Future challenges in IC testing and fault isolation

  • Author

    Vallett, David P.

  • Author_Institution
    IBM Microelectron. Div., USA
  • Volume
    2
  • fYear
    2003
  • fDate
    27-28 Oct. 2003
  • Firstpage
    539
  • Abstract
    Integrated circuit (IC) production is critically dependent on characterization and failure analysis (FA) (Ref. 1). Experiment evaluation, technology qualification, yield and reliability learning, and time-to-market are driven by rapid and accurate FA. Testing and fault isolation are essential in identifying electrical faults and in localizing them to regions small enough to be examined by high-resolution electron and scanning-probe microscopes. This presentation introduces IC characterization and failure analysis, discusses their roles in manufacturing, and examines limitations imposed by shrinking features, lower supply voltages, and smaller design margins. R&D needs are also projected based on the CMOS IC technology roadmap (Ref. 1).
  • Keywords
    electron microscopes; failure analysis; fault location; integrated circuit reliability; integrated circuit testing; integrated circuit yield; scanning probe microscopy; IC testing; electrical faults; electron microscope; failure analysis; fault isolation; integrated circuit production; reliability learning; scanning-probe microscopes; technology qualification; CMOS technology; Circuit faults; Circuit testing; Failure analysis; Integrated circuit technology; Integrated circuit testing; Integrated circuit yield; Isolation technology; Production; Qualifications;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
  • ISSN
    1092-8081
  • Print_ISBN
    0-7803-7888-1
  • Type

    conf

  • DOI
    10.1109/LEOS.2003.1252912
  • Filename
    1252912