On the road to reliable MEMS

Author

Gasparyan, A. ; Shea, H. ; Arney, S. ; Aksyuk, V. ; Simon, M.E. ; Pardo, F. ; Chan, H.B. ; Kim, J. ; Gates, J. ; Goyal, S. ; Kleiman, R.

Author_Institution

Lucent Technol. Bell Labs., Murray Hill, NJ, USA

Volume

2

fYear

2003

fDate

27-28 Oct. 2003

Firstpage

626

Abstract

Dielectric charging, mechanical creep and fatigue of materials, stresses in thin films, sensitivity to mechanical vibrations and shock is but a partial list of issues that may arise on the road to reliable MEMS. Major electrical and mechanical phenomenon that may limit the lifetime or functionality of MEMS devices will be discussed along with the design rules, materials choices and reliability vs. functionality tradeoffs that are required for designing MEMS for high performance and reliability.

Keywords

creep; electric properties; fatigue; micromechanical devices; micromirrors; optical films; optical materials; stress relaxation; vibrations; MEMS; MEMS design; dielectric charging; electrical phenomenon; material fatigue; mechanical creep; mechanical phenomenon; mechanical vibration sensitivity; shock; thin film stress; Creep; Dielectric materials; Dielectric thin films; Electric shock; Fatigue; Materials reliability; Micromechanical devices; Roads; Stress; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE

ISSN

1092-8081

Print_ISBN

0-7803-7888-1

Type

conf

DOI

10.1109/LEOS.2003.1252956

Filename

1252956