Title :
Profile characterization using optical diffraction microscopy
Author :
Hansen, P.-E. ; Agersnap, N. ; Kühle, A. ; Garnæs, J. ; Petersen, J.C.
Author_Institution :
LuKa Optoscope, Farum
Abstract :
Recent developments In optical profile characterisation using optical diffraction microscopy are described. Grating profiles are characterized from the measured diffraction efficiencies. The surface topography Is found by varying model topography and matching the calculated and measured diffraction efficiencies. The model parameters Include height, filling degree and sidewall angles. In the present work the method has been applied to gratings having various material composition. A series of gratings with periods ranging from 399 nm to 1245 nm has been Investigated. It Is shown that optical diffraction microscopy Is a simple and fast method for retrieving grating profiles and the material boundary between the grating materials. The results show good agreement with atomic force microscope measurements.
Keywords :
atomic force microscopy; diffraction gratings; light scattering; optical microscopy; surface topography; surface topography measurement; atomic force microscope; electromagnetic scattering; grating profiles; optical diffraction microscopy; surface topography; Atomic force microscopy; Atomic measurements; Composite materials; Diffraction gratings; Filling; Force measurement; Optical diffraction; Optical materials; Optical microscopy; Surface topography; Atomic force microscope; electromagnetic scattering by periodic structures; gratings; optical diffraction;
Conference_Titel :
Northern Optics, 2006
Conference_Location :
Bergen
Print_ISBN :
14244-0435-5
DOI :
10.1109/NO.2006.348369
