Manufacturing optimization improvements leveraging SEMI E94-1107

In 2007, SEMI´s information and control committee approved a new version of SEMI E94 (E94-1107). This version relaxed the connection between carriers and control job for processing wafers and formally introduced a way to redirect material based on host requests after the beginning of processing. As simulations indicate, this new standard is impacting several fab performance indicators, including throughput, cycle time, yield, and just-in-time (JIT) customer response. This paper discusses possible use cases leveraging the new standard feature and the resulting performance improvements.