Advanced effective dispatching method for 300mm Twin-Phase Twin-Fab

Author

Chang, Cheng-Sheng ; Lo, Hsi-Lo ; Pan, Cheng-Chung ; Wu, De-Lung

Author_Institution

Rexchip Electron. Corp., Taichung, Taiwan

fYear

2009

fDate

10-12 May 2009

Firstpage

76

Lastpage

79

Abstract

To establish a 300 mm-wafer large-scale Fab a lot of time and a large investment is needed. In order to reduce periods of Fab from construction to the actual manufacturing and make resource more efficient, we divided our Fab into 2 phase full line Fab called Twin-Phase Fab. Because we currently have 300 mm Twin-Phase Twin-Fab now, dispatching is more complicated. We develop an advanced RTD (Real-Time Dispatching) system to assist our manufacturing to face complicated dispatching issues. This advanced RTD system has been implemented into one 300 mm Fab and proved to enhance waiting-time difference from 2.4 hours to 0.9 hours. The number of inefficient cross-phase transfer also decreased by 92%.

Keywords

production engineering; wafer-scale integration; advanced effective dispatching method; advanced real-time dispatching system; size 300 mm; time 2.4 hr to 0.9 hr; twin-phase twin-Fab; Dispatching; Investments; Large-scale systems; Logic; Manufacturing; Materials handling; Production; Real time systems; 300mm; Automation; Real-time Dispatching; twin-Fab; twin-phase;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference, 2009. ASMC '09. IEEE/SEMI

Conference_Location

Berlin

ISSN

1078-8743

Print_ISBN

978-1-4244-3614-9

Electronic_ISBN

1078-8743

Type

conf

DOI

10.1109/ASMC.2009.5155957

Filename

5155957