Title :
Optimizing flexibility and equipment utilization through qualification management
Author :
Johnzén, Carl ; Dauzere-Peres, Stephane ; Vialletelle, Philippe ; Yugma, Claude
Author_Institution :
Centre Microelectron. de Provence, Ecole des Mines de St.-Etienne, Gardanne, France
Abstract :
In order to use semiconductor manufacturing equipment more efficiently, a Decision Support System (DSS) has been developed, which suggests on which tools processes should be qualified. The DSS suggests qualifications that optimize earlier developed flexibility measures. This article studies which impact the suggested qualifications may have on the performance in various wafer fab workshops.
Keywords :
decision support systems; optimisation; production engineering; production engineering computing; production equipment; quality management; semiconductor industry; tools; decision support system; equipment utilization; flexibility; optimization; qualification management; semiconductor manufacturing equipment; Cost function; Decision support systems; Engineering management; Industrial engineering; Job shop scheduling; Lithography; Manufacturing processes; Production; Qualifications; Semiconductor device manufacture; Flexibility Optimization; Industrial Engineering; Manufacturing Efficiency; Qualification Management; WIP Management;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2009. ASMC '09. IEEE/SEMI
Conference_Location :
Berlin
Print_ISBN :
978-1-4244-3614-9
Electronic_ISBN :
1078-8743
DOI :
10.1109/ASMC.2009.5155962
