Prediction of chemical consumption in semiconductor fabrication

Author

Zisgen, Horst ; Kleinhenz, Richard ; Eickelmann, Hans-Jürgen ; Haubrich, Manfred ; Marschollek, Frank

Author_Institution

IBM Deutschland GmbH, Ind. Software Solutions, Mainz, Germany

fYear

2009

fDate

10-12 May 2009

Firstpage

119

Lastpage

123

Abstract

A system to predict chemical consumption in semiconductor fabrication is presented. The model is a bottom-up approach based on the routes and the associated process steps. Consumptions are modeled as variable and fixed in order to enable the analysis of product mix and workload dependencies. Additionally it is shown how the huge amount of data needed to feed such a detailed model can be acquired and how the model is implemented in the 300 mm fab of IBM in East Fishkill, NY.

Keywords

bills of materials; queueing theory; semiconductor industry; semiconductor process modelling; Bills of Materials; Chemical BOM; Enterprise Production Planning and Optimization; chemical consumption; product mix analysis; queueing network model; semiconductor fabrication; workload dependency analysis; Chemical industry; Chemical processes; Chemical products; Chemical technology; Fabrication; Predictive models; Procurement; Semiconductor device manufacture; Semiconductor device modeling; Semiconductor materials;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference, 2009. ASMC '09. IEEE/SEMI

Conference_Location

Berlin

ISSN

1078-8743

Print_ISBN

978-1-4244-3614-9

Electronic_ISBN

1078-8743

Type

conf

DOI

10.1109/ASMC.2009.5155969

Filename

5155969