Title :
Prediction of chemical consumption in semiconductor fabrication
Author :
Zisgen, Horst ; Kleinhenz, Richard ; Eickelmann, Hans-Jürgen ; Haubrich, Manfred ; Marschollek, Frank
Author_Institution :
IBM Deutschland GmbH, Ind. Software Solutions, Mainz, Germany
Abstract :
A system to predict chemical consumption in semiconductor fabrication is presented. The model is a bottom-up approach based on the routes and the associated process steps. Consumptions are modeled as variable and fixed in order to enable the analysis of product mix and workload dependencies. Additionally it is shown how the huge amount of data needed to feed such a detailed model can be acquired and how the model is implemented in the 300 mm fab of IBM in East Fishkill, NY.
Keywords :
bills of materials; queueing theory; semiconductor industry; semiconductor process modelling; Bills of Materials; Chemical BOM; Enterprise Production Planning and Optimization; chemical consumption; product mix analysis; queueing network model; semiconductor fabrication; workload dependency analysis; Chemical industry; Chemical processes; Chemical products; Chemical technology; Fabrication; Predictive models; Procurement; Semiconductor device manufacture; Semiconductor device modeling; Semiconductor materials;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2009. ASMC '09. IEEE/SEMI
Conference_Location :
Berlin
Print_ISBN :
978-1-4244-3614-9
Electronic_ISBN :
1078-8743
DOI :
10.1109/ASMC.2009.5155969
