Optimal design of a micro axial flux switched-reluctance motor

To provide a low cost driven force with high operational precision in semiconductor manufacturing industry, a micro axial flux switched-reluctance motor (muA FSRM) that can be integrated with the microelectromechanical system (MEMS) fabrication scheme has been designed and investigated. With both the degraded material property after electroplating process and the geometric constraints of MEMS constructions being considered, magnetic characteristics of the muAFSRM were carefully analyzed by three-dimensional finite element analysis. Supported by a laboratory prototype, the generated torques and axial-direction normal forces at different pole gaps and overlapped areas of the motor can be evaluated to provide an optimal design and operational basis