Novel SEM based imaging using secondary electron spectrometer for enhanced voltage contrast and bottom layer defect review

The challenge of high quality SEM imaging of defects at the bottom of dense and high aspect ratio structures is addressed here. We present a method that leverages the natural voltage contrast developed along dense topographies, by amplifying the information from the bottom of dense structures, using a secondary electron spectrometric technique. This improves both the detection limits and the defect image quality helping to obtain the defect root cause.