Fabrication and performance of high-density, matrix-addressable green and ultraviolet micro-LED arrays

Author

Jeon, C.W. ; Choi, H.W. ; Dawson, M.D.

Author_Institution

Inst. of Photonics, Strathclyde Univ., Glasgow, UK

Volume

2

fYear

2003

fDate

27-28 Oct. 2003

Firstpage

878

Abstract

The main task involved in the development of micro-LED arrays relates to the electrical contacting and interconnection of each individual pixel. Planarization has been a common solution employed to level out uneven topologies. The fabrication and performance of GaN-based micro-light emitting diode (μm-LED) arrays with 64×64 elements, with emission at the wavelengths of 510nm (green) and 370nm (near-UV), are reported. It is clear that each individual pixel is well resolved and there is no significant optical cross-talk. We will report fully on these devices, and also on 128×96 arrays at both wavelengths which are currently in development.

Keywords

gallium compounds; light emitting diodes; micro-optics; optical arrays; optical crosstalk; optical fabrication; optical interconnections; visible spectra; 370 nm; 510 nm; electrical contacting; fabrication; high-density performance; interconnection; matrix-address; micro-light emitting diode; optical cross-talk; ultraviolet micro-LED array; Chemical elements; Etching; Fabrication; Gallium nitride; Optical arrays; Optical crosstalk; Plasma measurements; Power generation; Power measurement; Stimulated emission;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE

ISSN

1092-8081

Print_ISBN

0-7803-7888-1

Type

conf

DOI

10.1109/LEOS.2003.1253082

Filename

1253082