Title :
Integrated optical sensors
Author :
Lambeck, Paul V. ; Hoekstra, Hugo
Author_Institution :
MESA Inst., Twente Univ., Enschede, Netherlands
Abstract :
The optical (tele-) communication is the main driving force for the worldwide R&D on integrated optical devices and microsystems. lO-sensors have to compete with many other sensor types both within the optical domain (fiber sensors) and outside that domain, where sensors based on measurand induced changes of electrical conductivity or of mechanical properties such as SAW and micromechanical (e.g. cantilever) sensors are the main competitors. Hence R&D of IO-sensors have to be directed to fields where the strong points of IO-sensors match the dominant requirements of specific applications.
Keywords :
electrical conductivity; integrated optics; mechanical properties; micromechanical devices; optical communication; optical sensors; research and development; surface acoustic waves; SAW; cantilever; electrical conductivity; integrated microsystem; integrated optical sensor; mechanical property; micromechanical sensor; optical fiber sensor; optical telecommunication; Force measurement; Force sensors; Integrated optics; Mechanical sensors; Optical devices; Optical fiber communication; Optical fiber devices; Optical fiber sensors; Optical sensors; Research and development;
Conference_Titel :
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7888-1
DOI :
10.1109/LEOS.2003.1253128
