Integrated optical sensors

Author

Lambeck, Paul V. ; Hoekstra, Hugo

Author_Institution

MESA Inst., Twente Univ., Enschede, Netherlands

Volume

2

fYear

2003

fDate

27-28 Oct. 2003

Firstpage

967

Abstract

The optical (tele-) communication is the main driving force for the worldwide R&D on integrated optical devices and microsystems. lO-sensors have to compete with many other sensor types both within the optical domain (fiber sensors) and outside that domain, where sensors based on measurand induced changes of electrical conductivity or of mechanical properties such as SAW and micromechanical (e.g. cantilever) sensors are the main competitors. Hence R&D of IO-sensors have to be directed to fields where the strong points of IO-sensors match the dominant requirements of specific applications.

Keywords

electrical conductivity; integrated optics; mechanical properties; micromechanical devices; optical communication; optical sensors; research and development; surface acoustic waves; SAW; cantilever; electrical conductivity; integrated microsystem; integrated optical sensor; mechanical property; micromechanical sensor; optical fiber sensor; optical telecommunication; Force measurement; Force sensors; Integrated optics; Mechanical sensors; Optical devices; Optical fiber communication; Optical fiber devices; Optical fiber sensors; Optical sensors; Research and development;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE

ISSN

1092-8081

Print_ISBN

0-7803-7888-1

Type

conf

DOI

10.1109/LEOS.2003.1253128

Filename

1253128