Coplanar line based low loss microwave phase shifters with electromechanical control

Paper presents the study of phase shifters with mechanical control based on coplanar line. Reconfiguration in a form where signal line of coplanar waveguide can be lifted above substrate provides strong perturbation of electromagnetic filed and thus ensures strong sensitivity. Utilization of high-Q dielectric materials makes it possible to extend substantially the operation frequency range while maintain low loss. Need displacement may be reduced to the range of tens micrometers, thus allowing utilization of fast piezo-actuators or MEMS.