Title :
Embedded optical waveguides in silicon for inter and intra-chip data optical interconnects
Author :
Stepanov, Stanislav ; Ruschin, Shlomo
Author_Institution :
Dept. of Phys. Electron., Tel Aviv Univ., Tel-Aviv, Israel
Abstract :
Embedded optical channel waveguides in silicon were realized. The fabrication includes passivation of the inner walls and core filling by a transparent polymer. The waveguides are proposed as data busses beneath Si-based circuitry.
Keywords :
embedded systems; integrated optics; optical interconnections; optical polymers; optical waveguides; passivation; silicon; Si; core filling; data busses; embedded optical channel waveguides; interchip data optical interconnects; intrachip data optical interconnects; passivation; silicon; transparent polymer; Optical device fabrication; Optical fibers; Optical interconnections; Optical transmitters; Silicon;
Conference_Titel :
Optical Interconnects Conference, 2012 IEEE
Conference_Location :
Santa Fe, NM
Print_ISBN :
978-1-4577-1620-1
DOI :
10.1109/OIC.2012.6224432
