Title :
Defect enhanced silicon-on-insulator microdisk photodetector
Author :
Ackert, Jason ; Knights, Andrew ; Fiorentino, Marco ; Beausoleil, Ray ; Jessop, Paul
Author_Institution :
Dept. of Eng. Phys., McMaster Univ., Hamilton, ON, Canada
Abstract :
We demonstrate a CMOS compatible silicon-on-insulator microdisk resonator photodiode with an enhanced response owing to the introduction of defects via ion implantation.
Keywords :
CMOS integrated circuits; ion implantation; micro-optics; micromechanical resonators; photodetectors; silicon-on-insulator; CMOS; Si; ion implantation; microdisk resonator photodiode; silicon-on-insulator; Absorption; Ion implantation; Optical resonators; Optical waveguides; Photodiodes; Silicon on insulator technology; ion implantation; microdisk resonators; photodetectors;
Conference_Titel :
Optical Interconnects Conference, 2012 IEEE
Conference_Location :
Santa Fe, NM
Print_ISBN :
978-1-4577-1620-1
DOI :
10.1109/OIC.2012.6224439
