Title :
Silicon based double-layer 1×12 multimode interference coupler for three-dimensional photonic integration
Author :
Zhang, Yang ; Hosseini, Amir ; Ahn, Jaehyun ; Kwong, David N. ; Fallahazad, Babak ; Tutuc, Emanuel ; Chen, Ray T.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Texas at Austin, Austin, TX, USA
Abstract :
We present a scheme for fabricating on-chip vertically integrated three-dimensional (3D) photonic integrated circuit (PIC). Double-layer 1×12 multimode interference (MMI) couplers with low excess loss and uniform outputs are fabricated on double-bonded silicon-on-insulator (SOI) wafer.
Keywords :
elemental semiconductors; integrated optics; light interference; optical couplers; optical fabrication; silicon; silicon-on-insulator; SOI; Si; double-bonded silicon-on-insulator wafer; double-layer multimode interference coupler; on-chip vertically integrated three-dimensional photonic integrated circuit; three-dimensional photonic integration; Couplers; Interference; Optical losses; Optical waveguides; Photonics; Propagation losses; Silicon; Multimode Interference; Three-dimensional;
Conference_Titel :
Optical Interconnects Conference, 2012 IEEE
Conference_Location :
Santa Fe, NM
Print_ISBN :
978-1-4577-1620-1
DOI :
10.1109/OIC.2012.6224450
