DocumentCode
2404409
Title
An investigation of silicon thin membranes for MOMS
Author
Müller, Raluca ; Obreja, Paula ; Manea, Elena ; Nastase, Nicoleta
Author_Institution
Inst. of Microtechnol., Bucharest, Romania
Volume
2
fYear
1998
fDate
6-10 Oct 1998
Firstpage
345
Abstract
This paper presents experiments of manufacturing of thin membranes (less than 10 μm) which can be part of a pressure sensor with optical detection and the investigation of their surface roughness. Anisotropic etching were performed at different temperature and for different concentrations in KOH and TMAH solutions. A silicon elastomer was investigate as masking material during the etching
Keywords
elemental semiconductors; etching; membranes; micro-optics; microsensors; optical sensors; pressure sensors; silicon; surface topography; KOH solution; MOMS; Si; TMAH solution; anisotropic etching; manufacture; masking material; micro-opto-mechanical system; optical detection; pressure sensor; silicon elastomer; silicon membrane; surface roughness; Biomembranes; Etching; Geometrical optics; Message-oriented middleware; Optical detectors; Optical sensors; Pulp manufacturing; Rough surfaces; Silicon; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1998. CAS '98 Proceedings. 1998 International
Conference_Location
Sinaia
Print_ISBN
0-7803-4432-4
Type
conf
DOI
10.1109/SMICND.1998.733759
Filename
733759
Link To Document