DocumentCode
2404577
Title
The impurities diffusion in the semiconductors using the finite elements method
Author
Schiopu, Paul ; Lakato, Eugen ; Degeratu, Vasile ; Stefan, Cornelia ; Ivan, S.
Author_Institution
Bucharest Politehnica Univ., Romania
Volume
2
fYear
1998
fDate
6-10 Oct 1998
Firstpage
387
Abstract
The finite elements method is a very efficient research and development tool, with many utilizations and different applications. This paper presents the impurities diffusion in the semiconductors using the finite elements method, starting from the similitude between the equation that describes the heat conduction in solids and the diffusion equations
Keywords
diffusion; finite element analysis; semiconductors; finite element method; heat conduction; impurity diffusion; semiconductor; Analytical models; Character generation; Finite element methods; Integral equations; Numerical models; Physics; Semiconductor impurities; Solids; Temperature distribution; Thermal conductivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1998. CAS '98 Proceedings. 1998 International
Conference_Location
Sinaia
Print_ISBN
0-7803-4432-4
Type
conf
DOI
10.1109/SMICND.1998.733769
Filename
733769
Link To Document