Carbon nanotubes-based microwave and millimeter wave sensors

Author

Dragoman, M. ; Muller, A. ; Neculoiu, D. ; Konstantinidis, G. ; Grenier, K. ; Dubuc, D. ; Bary, L. ; Plana, R. ; Hartnagel, H. ; Fourn, E. ; Flahaut, E.

Author_Institution

Nat. Res. & Dev. Inst. in Microtechnol., Bucharest

fYear

2007

fDate

9-12 Oct. 2007

Firstpage

16

Lastpage

19

Abstract

The aim of this paper is to experimentally demonstrate the applications of carbon nanotubes as microwave and millimeter wave sensors. In this respect, two different sensors are presented. The first sensor is a microwave mass sensor termed as RF nanobalance able to detect 1 ng (10^-9 g) of matter. The nanolabalance consists in a GaN membrane bulk acoustic wave resonator covered with a thin film of carbon nanotubes. The second sensor is a gas sensor which is a micromachined coplanar waveguide filled with carbon nanotubes. When exposed to gas, significantly changes in the modulus and phase of the transmission as observed for a wide range of frequencies up to 110 GHz.

Keywords

III-V semiconductors; acoustic resonators; bulk acoustic wave devices; carbon nanotubes; coplanar waveguides; gallium compounds; gas sensors; microwave detectors; millimetre wave detectors; wide band gap semiconductors; GaN; RF nanobalance; bulk acoustic wave resonator; carbon nanotubes; gas sensor; mass sensor; micromachined coplanar waveguide; microwave sensors; millimeter wave sensors; thin film; Acoustic sensors; Acoustic signal detection; Acoustic waves; Biomembranes; Carbon nanotubes; Gallium nitride; Gas detectors; Microwave sensors; Radio frequency; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2007. European

Conference_Location

Munich

Print_ISBN

978-2-87487-001-9

Type

conf

DOI

10.1109/EUMC.2007.4405114

Filename

4405114