Dependence of resonant wavelength and mechanical deformation of photonic crystal cantilever integrated with dual nano-ring resonator

We investigated photonic crystals based dual nano-ring channel drop filters which are nanomechanically tunable. The backward channel drop mechanism is explained by a proposed model. Resonant peak observed on the free stand device is located 1553.6 nm with quality factor better than 3800 at backward drop port. When this dual nano-ring is integrated at the junction between silicon cantilever and substrate, the deformation of silicon cantilever can shift the filter resonant wavelength. The 1 nm wavelength shift is derived by minimum tuning force of 370 nN.