New topologies of tunable bandstop MEMS filters for millimeter wave applications

This paper addresses the design and the realization of tunable bandstop filters using MEMS (micro-electro-mechanical-Systems) technology for millimeter wave applications. In order to design bandstop tunable MEMS filters, three new topologies are presented. The presented measurement and simulation results validate the proposed topologies. The tunable behavior is achieved using MEMS switches. These switches, based on original topology of two cantilever shunt switch (TCSS), have a typical shunt switch behavior and intrinsic low actuation voltage. The overall structures, including TCSS, have been manufactured using dielectric membrane, in order to minimize the insertion losses.