GaAsSb DHBT IC technology for RF and microwave instrumentation

Author

Low, T.S. ; Dvorak, M.W. ; Farhoud, M. ; Yeats, R.E. ; Iwamoto, M. ; Essilfie, G.K. ; Engel, T. ; Keppeler, B. ; Chang, J.S.C. ; Hadley, J. ; Patterson, G. ; Kellert, F. ; Moll, N. ; Bahl, S.R. ; Hutchinson, C.P. ; Ehlers, E. ; Adamski, M.E. ; Culver, M.K

Author_Institution

Agilent Techologies, Santa Rosa, CA, USA

fYear

2005

fDate

30 Oct.-2 Nov. 2005

Abstract

A high performance GaAsSb base, InP collector DHBT IC process has been developed for RF, microwave and telecommunications instrumentation. The GaAsSb process achieves f_T and f_max values of 185 GHz and 220 GHz respectively, at operating currents of J_c= 1.5 mA/μm², with catastrophic on-state breakdown voltages of BVcbx = 9 V at J_c= 1.3 mA/μm². Typical β= 50. The MTTF values of > 1 × 10⁶ h at maximum operating conditions (T_j = 125 °C, J_c = 2.0 mA/μm²) are suitable for instrumentation-grade applications. The DHBTs are integrated with a 3-layer metal chassis including 2 resistor levels and an MIM capacitor. This IC technology is manufactured on a 3" production line for use in Agilent Technologies instrumentation products.

Keywords

III-V semiconductors; arsenic compounds; bipolar integrated circuits; gallium arsenide; heterojunction bipolar transistors; indium compounds; microwave bipolar transistors; microwave integrated circuits; millimetre wave integrated circuits; 125 C; 185 GHz; 220 GHz; 9 V; DHBT IC process; GaAsSb; GaAsSb DHBT IC technology; InP; MIM capacitor; RF instrumentation; breakdown voltages; metal chassis; microwave instrumentation; resistor levels; telecommunications instrumentation; Indium phosphide; Instruments; MIM capacitors; Manufacturing; Microwave integrated circuits; Microwave technology; Production; Radio frequency; Radiofrequency integrated circuits; Resistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Compound Semiconductor Integrated Circuit Symposium, 2005. CSIC '05. IEEE

Print_ISBN

0-7803-9250-7

Type

conf

DOI

10.1109/CSICS.2005.1531760

Filename

1531760