Title :
CMOS microfluidic fabrication technology for biomedical applications
Author :
Rasmussen, Angela ; Zaghloul, Mona E.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., George Washington Univ., Washington, DC, USA
Abstract :
This paper presents an overview of current techniques available to produce CMOS microfluidic systems. By using the techniques described within this paper, smart, inexpensive, and microscale microfluidic systems are achievable. These systems can combine both the electronics needed for control and signal processing with the microfluidic components to achieve a one-chip complete system
Keywords :
CMOS integrated circuits; biomedical electronics; microfluidics; CMOS microfluidic fabrication technology; biomedical applications; control electronics; microscale microfluidic systems; one-chip complete system; signal processing; Biomedical monitoring; CMOS technology; Chemical analysis; Control systems; DNA; Drugs; Fabrication; Microfluidics; Performance evaluation; Testing;
Conference_Titel :
Circuits and Systems, 1999. 42nd Midwest Symposium on
Conference_Location :
Las Cruces, NM
Print_ISBN :
0-7803-5491-5
DOI :
10.1109/MWSCAS.1999.867754
