DocumentCode
2405802
Title
Modelling of tuneable acoustic resonators based on BSTO films with induced piezoelectric effect
Author
Turalchuk, Pavel ; Vendik, Irina ; Vendik, Orest ; Berge, John
Author_Institution
St. Petersburg Electrotech. Univ., St .Petersburg
fYear
2007
fDate
9-12 Oct. 2007
Firstpage
282
Lastpage
285
Abstract
A reliable model of a tuneable bulk acoustic resonator based on BSTO film with induced piezoelectric effect is proposed. The estimation of resonance and antiresonance frequency shift of bulk acoustic resonator as a function of the applied voltage has been carried out. The results of the input impedance modelling of the BSTO bulk acoustic resonator are in agreement with the experimental data.
Keywords
acoustic resonators; dielectric resonators; dielectric thin films; piezoelectricity; BSTO films; antiresonance frequency shift; induced piezoelectric effect; input impedance modelling; tuneable bulk acoustic resonator; Electrostriction; Ferroelectric materials; Film bulk acoustic resonators; Impedance; Microwave devices; Nonlinear equations; Piezoelectric effect; Piezoelectric films; Piezoelectric materials; Tensile stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2007. European
Conference_Location
Munich
Print_ISBN
978-2-87487-001-9
Type
conf
DOI
10.1109/EUMC.2007.4405181
Filename
4405181
Link To Document