Title :
Integration of photonic sensor array with GeSi photo-detectors for multiplexing detection
Author :
Chen, X.T. ; Wang, B. ; Chandrappan, J. ; Tian, W.Y. ; Ang, K.W. ; Reboud, J. ; Je, M.K. ; Kumarasamy, R.M. ; Lo, Patrick
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
A approach of using high performance Ge photo-detectors (PD) integrated with Si waveguide based microresonators for multiplexing detection has been proposed. Simultaneous measurement of the resonance curves of sensor array using this approach has been demonstrated. The resonance peaks of integrated sensor array show good correlation (R2=0.9979) with that of normal resonator, proving the feasibility of this approach for multiplexed bio-sensing application.
Keywords :
biosensors; germanium; integrated optics; micro-optomechanical devices; micromechanical resonators; microsensors; multiplexing; optical sensors; optical waveguides; photodetectors; sensor arrays; silicon; Ge-Si; microresonators; multiplexed bio-sensing; multiplexing detection; optical waveguides; photodetector integration; photonic sensor array; Arrays; Multiplexing; Optical fiber sensors; Optical ring resonators; Optical waveguides; Silicon;
Conference_Titel :
Photonics Global Conference (PGC), 2010
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-9882-6
DOI :
10.1109/PGC.2010.5706076
