Design optimization of cantilever Beam MEMS switch

Author

Gong, Yanjue ; Zhang, Li ; Zhao, Fu ; Meng, Chunling ; Lv, Liang

Author_Institution

Coll. of Mech. Eng., Beijing Technol. & Bus. Univ., Beijing, China

fYear

2009

fDate

15-16 May 2009

Firstpage

28

Lastpage

31

Abstract

This paper takes the cantilever beam MEMS switch as an research object to discuss its mechanical principle and carry out optimal design. Four kinds of cantilever beams with different sections are selected to analysis their mode frequencies. Referring the larger mode frequency of MEMS structure, an optimal design solution has been introduced to determine a group of reasonable structure parameters which improve the dynamic stiffness of the switch. Finally, the random response and harmonic response analysis are implemented to validate the optimal design.

Keywords

beams (structures); cantilevers; design engineering; finite element analysis; micromechanical devices; modal analysis; vibrations; MEMS structure; MEMS switch; cantilever beam; design optimization; finite element analysis; Design optimization; Finite element methods; Insertion loss; Micromechanical devices; Microswitches; Performance analysis; Power semiconductor switches; Radio frequency; Structural beams; Switching circuits; MEMS; design optimization; finite element analysis; random vibration analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Mechatronics and Automation, 2009. ICIMA 2009. International Conference on

Conference_Location

Chengdu

Print_ISBN

978-1-4244-3817-4

Type

conf

DOI

10.1109/ICIMA.2009.5156552

Filename

5156552