Title :
On the ignition voltage behavior of microwave microplasmas
Author :
Kühn, Silvio ; Andrei, Cristina ; Gesche, Roland
Author_Institution :
Ferdinand-Braun-Inst. fur Hochstfrequenztechnik, Berlin
Abstract :
Small-sized plasmas excited at microwave frequencies offer interesting applications from industrial processing to medicine. This paper presents first data on the ignition voltages of such microwave microplasmas. Using a quarter-wavelength resonant structure, an automated test system was set up, which allows to perform multiple ignition tests for each parameter constellation. Ignition voltage statistics are reported as well as the dependence on gas pressure for Ar, He and air in the range from 0.6 mbar to atmospheric pressure.
Keywords :
microwave devices; plasma devices; resonators; automated test system; gas pressure; ignition voltage behavior; microwave microplasmas; multiple ignition tests; parameter constellation; quarter wavelength resonant structure; Automatic testing; Ignition; Microwave frequencies; Performance evaluation; Plasma applications; Plasma materials processing; Resonance; Statistics; System testing; Voltage;
Conference_Titel :
Microwave Conference, 2007. European
Conference_Location :
Munich
Print_ISBN :
978-2-87487-001-9
DOI :
10.1109/EUMC.2007.4405267
