Title :
Characteristic analysis of gas detection basing on metal oxide semiconductor sensor
Author :
Xu, Dingjun ; Zhang, Zhengyong
Author_Institution :
Inst. of Intell. Machines, Chinese Acad. of Sci. Hefei, Hefei, China
Abstract :
This paper analyzes gas detection characteristic of the metal oxide semiconductor sensor, and puts forward the logarithm model of detecting single gas basing on our experiment data, also we infer the analysis formula model of detecting mixture gas fetched from the single gas detection model. We compare the error of our model with the errors of some models proposed by other researchers, and also we propose some points for attention in the practical application.
Keywords :
MIS devices; error analysis; gas sensors; error analysis; gas detection technology; metal oxide semiconductor sensor; mixture gas detection; Biosensors; Ethanol; Gas detectors; Intelligent sensors; Pollution; Robotics and automation; Sensor phenomena and characterization; Stability; Surface resistance; Vehicle detection; Error analysis; Logarithm model; Response curve; Semiconductor sensor;
Conference_Titel :
Industrial Mechatronics and Automation, 2009. ICIMA 2009. International Conference on
Conference_Location :
Chengdu
Print_ISBN :
978-1-4244-3817-4
DOI :
10.1109/ICIMA.2009.5156560
