Assembly and characterization of optical MEMS (micro-electro-mechanical systems)

Author

Khalil, Diaa ; Morshed, Ahmed H.

Author_Institution

Fac. of Eng., Ain Shams Univ., Cairo, Egypt

fYear

2002

fDate

2002

Firstpage

111

Lastpage

116

Abstract

In this work we present a locally developed MEMS-based technology for the assembly and characterization of optical MEMS components. For the assembly purpose, the processes required for the Si and glass micromachining (oxidation, photolithography and wet etching) are developed in the Laser lab at the faculty of Engineering, Ain Shams University. For the characterization purpose, an automated set-up for the spot size and misalignment loss measurements are developed

Keywords

etching; micro-optics; microassembling; micromachining; optical fabrication; optical loss measurement; optical testing; oxidation; packaging; photolithography; MOEMS device; V grooves; automated set-up; components assembly; free space optical fiber connection; knife-edge technique; micromachining; misalignment loss measurements; optical MEMS; oxidation; packaging; photolithography; silicon substrate; spot size; wet etching; Assembly; Glass; Lithography; Loss measurement; Micromachining; Micromechanical devices; Optical devices; Optical losses; Oxidation; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Photonics and Its Application at Egyptian Engineering Faculties and Institutes, 2002. Third Workshop on

Conference_Location

Giza

Print_ISBN

0-7803-7163-1

Type

conf

DOI

10.1109/PAIA.2002.995083

Filename

995083