Title :
High quality factor etchless silicon photonic ring resonators
Author :
Luo, Lian-Wee ; Gustavo, S.W. ; Cardenas, Jaime ; Lipson, Michal
Author_Institution :
Dept. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
Abstract :
We demonstrate high-Q silicon ring resonators fabricated by selective oxidation without any silicon etching. We achieve an intrinsic quality factor of 510,000 in 50 μm-radius ring resonators with ring losses of 0.8 dB/cm.
Keywords :
Q-factor; elemental semiconductors; integrated optics; optical fabrication; optical losses; optical resonators; optical waveguides; oxidation; silicon; silicon-on-insulator; Si; Si-SiO2; etchless silicon photonic ring resonators; optical fabrication; quality factor; radius 50 mum; ring losses; selective oxidation; silicon waveguides; silicon-on-insulator wafer;
Conference_Titel :
Photonics Global Conference (PGC), 2010
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-9882-6
DOI :
10.1109/PGC.2010.5706128
