DocumentCode :
2408254
Title :
Session - MEMS, Devices, and Sensors
fYear :
2006
fDate :
38821
Firstpage :
13
Lastpage :
13
Keywords :
Micromechanical devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronics and Electron Devices, 2006. WMED '06. 2006 IEEE Workshop on
Print_ISBN :
1-4244-0374-X
Type :
conf
DOI :
10.1109/WMED.2006.1678283
Filename :
1678283
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2408254
