Optimal Resources Allocation for a Hybrid Material Handling System in a 300mm Wafer Fab

Author

Liu, Chih-Ming ; Kuo, Chung-Jen ; Chang, Pei-Lun

Author_Institution

Dept. of Ind. Eng. & Eng. Manage., Nat. Tsing Hua Univ., Hsinchu

fYear

2006

fDate

10-12 July 2006

Firstpage

88

Lastpage

93

Abstract

This paper addresses the issue of the optimal resources allocation of automated material handling systems (AMHS) and operators for a hybrid material handing system in a 300-mm wafer fab. The proposed methodology exploits the colored timed Petri nets (CTPN) to model the hybrid material handing system, and then the CTPN model is further transformed into a three-phase discrete event simulation model for the performance analysis of the system. The experiment design is conducted to simulate different scenarios and the response surface method is applied to obtain the optimal allocation of AMHSs and operators for each scenario

Keywords

Petri nets; discrete event simulation; graph colouring; integrated circuit manufacture; materials handling; resource allocation; response surface methodology; 300 mm; automated material handling systems; colored timed Petri nets; discrete event simulation model; hybrid material handing system; optimal resource allocation; response surface method; wafer fab; Conducting materials; Ergonomics; Materials handling; Petri nets; Production systems; Resource management; Response surface methodology; Safety; Semiconductor device modeling; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

Discrete Event Systems, 2006 8th International Workshop on

Conference_Location

Ann Arbor, MI

Print_ISBN

1-4244-0053-8

Type

conf

DOI

10.1109/WODES.2006.1678413

Filename

1678413