Title :
EMMI analysis on silicon solar cell
Author :
Yeh, Benjamin ; Huang, Russell ; Chung, Kevin ; Chang, Alan ; Chu, Chih-Hsun
Author_Institution :
Mater. Anal. Technol. Inc., Hsinchu
Abstract :
This work utilized the EMMI as a tool for investigation of the junction leakage of crystalline silicon solar cell under reverse bias and forward bias. The defected areas were examined by the TEM to reveal the physical structure. In addition, analysis of physical structure and component of the solar cell were demonstrated by using common PFA tools, such as OM, SEM, EDX, FIB, and TEM.
Keywords :
silicon; solar cells; EDX; EMMI analysis; FIB; OM; PFA tools; SEM; Si; TEM; silicon solar cell; Crystallization; Electroluminescence; Image converters; Photovoltaic cells; Photovoltaic systems; Scanning electron microscopy; Shape; Silicon; Solar power generation; Surface texture;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2008. IPFA 2008. 15th International Symposium on the
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-2039-1
Electronic_ISBN :
978-1-4244-2040-7
DOI :
10.1109/IPFA.2008.4588180
