Title :
Au nanocrystal flash memory reliability and failure analysis
Author :
Singh, Pawan K. ; Singh, Kaushal K. ; Hofmann, Ralf ; Armstrong, Karl ; Krishna, Nety ; Mahapatra, Souvik
Author_Institution :
Dept. of Electr. Eng., IIT Bombay, Mumbai
Abstract :
In this work we investigate the memory performance and reliability of Au nanocrystal memory devices. We analyze the Au NC formation process and fabricate actual test wafers for electrical characterization. With reference to good Pt NC devices, poor performance of Au NC devices is investigated in detail by analytical and electrical methods.
Keywords :
failure analysis; flash memories; Au; Pt; electrical characterization; failure analysis; nanocrystal flash memory reliability; nanocrystal memory device; test wafer; Aluminum oxide; Annealing; Atherosclerosis; Dielectrics; Fabrication; Failure analysis; Flash memory; Gold; Nanocrystals; Potential well;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2008. IPFA 2008. 15th International Symposium on the
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-2039-1
Electronic_ISBN :
978-1-4244-2040-7
DOI :
10.1109/IPFA.2008.4588190
