Title :
RF transmission lines and spiral inductors using polymer-core conductor
Author :
Yook, Jong-Min ; Kyoung-Min Kim ; Yeo, Sung-Ku ; Yu, Je-In ; Kwon, Young-Se
Author_Institution :
Korea Adv. Inst. of Sci. & Technol., Daejeon
Abstract :
Thick RF transmission lines and spiral inductors were made using polymer-core conductor. The proposed fabrication process to make polymer-core conductor is very easy and cost effective compared with other RF MEMS processes. SU-8 photoresist was used as core. The fabricated transmission line and spiral inductors on a HRS (High Resistivity Silicon, 2500 Omega-Cm) have S21 of 0.08 dB/mm at 18 GHz and high Q factor more than 40 at 2 GHz respectively.
Keywords :
inductors; photoresists; polymers; radiofrequency integrated circuits; transmission lines; RF transmission lines; SU-8 photoresist; high resistivity silicon; polymer-core conductor; spiral inductors; Conductors; Costs; Fabrication; Inductors; Polymers; Radio frequency; Radiofrequency microelectromechanical systems; Resists; Spirals; Transmission lines; High Q; Inductor; Polymer-core conductors; SU-8;
Conference_Titel :
Microwave Conference, 2007. European
Conference_Location :
Munich
Print_ISBN :
978-2-87487-001-9
DOI :
10.1109/EUMC.2007.4405401
