DocumentCode
2410144
Title
Totally free-flexible membrane for low voltage MEMS metal contact switch
Author
Segueni, Karim ; Le Garrec, L. ; Rollier, Anne-Sophie ; Robin, Renaud ; Touati, Salim ; Kanciurzewski, Alexandre ; Buchaillot, Lionel ; Millet, Olivier
Author_Institution
DelfEMS SAS, Villeneuve d´´Ascq
fYear
2007
fDate
9-12 Oct. 2007
Firstpage
1153
Lastpage
1156
Abstract
This paper presents results concerning an electromechanical DC-contact shunt switch based on a patented totally free-flexible metal membrane combined with an associated low temperature surface micromachining fabrication process. The electrostatic actuation enables an average measured actuation voltage of 9.2 V for a 5 mum out-of-plane membrane deflection. The switch exhibits low insertion loss (0.32 dB @ 10 GHz) with good isolation (>30 dB @ 10 GHz).
Keywords
electrical contacts; electrostatic actuators; microswitches; electromechanical DC-contact shunt switch; electrostatic actuation; free-flexible membrane; insertion loss; low voltage MEMS metal contact switch; surface micromachining fabrication process; voltage 9.2 V; Biomembranes; Contacts; Electrostatic actuators; Electrostatic measurements; Fabrication; Low voltage; Micromachining; Micromechanical devices; Switches; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2007. European
Conference_Location
Munich
Print_ISBN
978-2-87487-001-9
Type
conf
DOI
10.1109/EUMC.2007.4405403
Filename
4405403
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