Title :
Degradation of metal-induced laterally crystallized n-type poly-Si thin-film transistors under dynamic voltage stress
Author :
Zhang, Meng ; Wang, Mingxiang ; Wang, Huaisheng
Author_Institution :
Dept. of Microelectron., Soochow Univ., Suzhou
Abstract :
Degradation of metal-induced laterally crystallized n-type poly-Si TFTs is systematically investigated under synchronized Vg and Vd stresses. In low frequencies, degradation independent of frequency is the same as that in DC self-heating stress, while in high frequencies, frequency dependent degradation is attributed to an additional mechanism associated with pulse rising/falling edges.
Keywords :
thin film transistors; DC self-heating stress; dynamic voltage stress; falling edges; frequency dependent degradation; metal-induced laterally crystallized transistors; n-type poly-Si thin-film transistors; pulse rising; Annealing; Crystallization; Degradation; Frequency synchronization; Microelectronics; Space vector pulse width modulation; Stress control; Temperature; Thin film transistors; Voltage;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2008. IPFA 2008. 15th International Symposium on the
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-2039-1
Electronic_ISBN :
978-1-4244-2040-7
DOI :
10.1109/IPFA.2008.4588214