Title :
High Speed High Density Poly I2L
Author :
Elsaid, M.H. ; Hashed, Ali M.
Author_Institution :
Dept. of Electron. & Comput., Ain Shams Univ., Cairo, Egypt
Abstract :
A new poly I2L structure with switching speed three times higher than that of the conventional I2L structure is presented. The packing density is also improved by a factor of two using this new structure.
Keywords :
high-speed integrated circuits; high speed high density poly I2L structure; packing density; switching speed; Capacitance; Delay; Epitaxial layers; Etching; Fabrication; Substrates;
Conference_Titel :
Solid State Circuits Conferene, 1980. ESSCIRC 80. 6th European
Conference_Location :
Grenoble
DOI :
10.1109/ESSCIRC.1980.5468774