DocumentCode
2411104
Title
Effects of atmosphere on the reliability of RF-MEMS capacitive switches
Author
Blondy, Pierre ; Crunteanu, Aurelian ; Pothier, Arnaud ; Tristant, Pascal ; Catherinot, Alain ; Champeaux, Corinne
Author_Institution
Univ. de Limoges, Limoges
fYear
2007
fDate
9-12 Oct. 2007
Firstpage
1346
Lastpage
1348
Abstract
The influence of atmosphere on capacitive RF-MEMS switches is studied. It is shown that ambient atmosphere not only induces an incremental effect on the degradation of MEMS switches but also completely changes the charging mechanism of the dielectrics, directly linked with RF-MEMS reliability behaviour of MEMS switches reliability. Operating RF-MEMS switches in a dry environment changes the mechanism of charging from surface charging to bulk charging.
Keywords
capacitors; circuit reliability; dielectric materials; electronics packaging; environmental degradation; microswitches; microwave switches; surface charging; MEMS switches degradation; RF-MEMS capacitive switches reliability; atmosphere effects; bulk charging; dielectric charging mechanism; dry environment condition; surface charging; Atmosphere; Dielectrics; Humidity; Microswitches; Packaging; Protection; Radiofrequency microelectromechanical systems; Surface charging; Switches; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2007. European
Conference_Location
Munich
Print_ISBN
978-2-87487-001-9
Type
conf
DOI
10.1109/EUMC.2007.4405452
Filename
4405452
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