Double-Layer Crystalline Silicon on Insulator Material Platform for Integrated Photonic Applications

Author

Moradinejad, Hesam ; Atabaki, Amir H. ; Hosseinnia, Amir Hossein ; Eftekhar, Ali Asghar ; Adibi, Ali

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

Volume

6

Issue

6

fYear

2014

fDate

Dec. 2014

Firstpage

1

Lastpage

8

Abstract

We report a high optical-quality double-layer silicon (Si) material platform with a thin interface oxide using a low-temperature wafer bonding technique. To assess the quality of the platform, resonators with different radii are fabricated, and their quality factors (Q) are measured. Q´s of 25 k and 350 k are demonstrated in 2-μm- and 20-μm-radius microring resonators, respectively. The former is the most compact high-Q resonator demonstrated in any type of double-layer Si platform, and the latter is the highest Q demonstrated in a double-layer Si platform to date. This material platform enables a new set of integrated optical devices for a wide range of applications, including high-speed modulators, tunable filters, and low-power switches.

Keywords

Q-factor; integrated optics; micro-optics; microcavities; optical fabrication; optical filters; optical modulation; optical multilayers; optical resonators; optical switches; silicon-on-insulator; wafer bonding; Si; double-layer crystalline silicon-on-insulator material platform; high optical-quality double-layer silicon material platform; high-speed modulators; integrated optical devices; integrated photonic applications; low-power switches; low-temperature wafer bonding technique; microring resonators; quality factors; radius 2 mum; radius 20 mum; resonators; thin interface oxide; tunable filters; Bonding; Optical resonators; Optical waveguides; Photonics; Silicon; Waveguide discontinuities; Integrated optics materials; integrated optics devices; resonators;

fLanguage

English

Journal_Title

Photonics Journal, IEEE

Publisher

ieee

ISSN

1943-0655

Type

jour

DOI

10.1109/JPHOT.2014.2366169

Filename

6945248